reactive adj. 1.反動的,倒退的,復(fù)古的。 2.反應(yīng)的;反作用的;反沖的;【電學(xué)】電抗的;【化學(xué)】反應(yīng)性的,活性的。 a reactive current 無效電流。 reactive power 無功電力。 reactivity n. adv. -ly ,-ness n.
Reactive sputter etching system 反應(yīng)性濺鍍蝕刻系統(tǒng)
Reactive sputtering system 反應(yīng)性濺鍍系統(tǒng)
Reactive sputtering source 反應(yīng)濺射源
Hysteresis in aluminum oxides films growth with pulsed reactive sputtering 鋁靶脈沖反應(yīng)濺射沉積氧化鋁薄膜中的遲滯回線的研究
The designed films of sio2 and sio2 / si are prepared on sample and hemisphere dome of sapphire by radio frequency magnetron reactive sputtering method 利用射頻磁控反應(yīng)濺射法,在藍寶石試片和半球形頭罩上制備出所設(shè)計的sio _ 2和sio _ 2 si增透膜系。
Through the technology of rf and dc reactive sputtering manufacture , h2s gas sensors have been developed on silicon substrate on which a heater made of pt were attached 通過交流和直流反應(yīng)濺射,我們以硅基片(表面上有白金加熱電極)為基底制作h _ 2s氣敏元件。
The thesis main parts are as followings : ( 1 ) the mechanical properties of the cnx thin film on the various substrate materials by dc magnetron reactive sputtering . ( 2 ) the study of the cnx film structure by x - ray diffraction 文章主要部分介紹、論述、總結(jié)了我在做畢業(yè)論文期間進行的五方面工作: ( 1 )用直流磁控反應(yīng)濺射方法在各種材料襯底上沉積cnx超硬薄膜,研究在不同襯底對薄膜的力學(xué)性質(zhì)的影響。
It was found that the decompose efficiency to solution associated with the number of films layer ; calcine temperature and ph value . some analyses have been performed . tio _ 2 films were also synthesized by reactive sputtering and chemical vapor deposition 通過溶膠凝膠法制備了tio _ 2薄膜對其進行光催化反應(yīng)實驗,發(fā)現(xiàn)膜層厚度、薄膜煅燒溫度和溶液ph值對降解效率都有直接的影響,并對結(jié)果進行分析。
We researched fabrication at different asputtering and annealing atmosphere , the different process conduced different electrical properties . we can conclude a higher annealing temperature and higher proportion of o2 during reactive sputtering favors the improvement of electrical performances of hfo2 dielectrics ; 4 . the analysis of i - v curves of these devices displays different leakage current mechanism under different area of applied bias - voltage ; as to silc . there are different leakage current mechanism at influence of sil . c ; 5 研究表明,在優(yōu)化工藝條件下制備的hfo _ 2介質(zhì)層中,襯底注入條件下由于其較低的體和界面缺陷密度,漏電流的輸運機制主要以schottky發(fā)射為主; silc效應(yīng)導(dǎo)致hfoz / si界面缺陷態(tài)的增加,從而使得襯底注入條件下,柵泄漏電流機制不僅有schottky發(fā)射還有f一p發(fā)射機制起主要作用; 5 )初步研究了氮化的hfo : ( hroxny )柵介質(zhì)的電學(xué)特征。
The experiments show an room temperature in the course of reactive sputtering conduces to restraining the surface reaction between hf02 and si layer ; 2 . we studied different surface progress . comparable with conventional method , the surface with nh4f cleaning step have superior thermal stability with hfo2 , nh4f cleaning step is introduced can reduces leakage current and eot ; 3 柵泄漏電流的減小可歸于氧空位缺陷的減小,即高的濺射氧氣氛和氧氣氛退火有助于減小hfo _ 2柵介質(zhì)中的氧空位缺陷; 4 )研究了反應(yīng)濺射制備的hfo _ 2柵介質(zhì)漏電流機制及其silc效應(yīng)。