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reactive sputtering中文是什么意思

  • 反應(yīng)濺射法
  • 往復(fù)濺射

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  • 例句與用法
  • Reactive sputter etching system
    反應(yīng)性濺鍍蝕刻系統(tǒng)
  • Reactive sputtering system
    反應(yīng)性濺鍍系統(tǒng)
  • Reactive sputtering source
    反應(yīng)濺射源
  • Hysteresis in aluminum oxides films growth with pulsed reactive sputtering
    鋁靶脈沖反應(yīng)濺射沉積氧化鋁薄膜中的遲滯回線的研究
  • The designed films of sio2 and sio2 / si are prepared on sample and hemisphere dome of sapphire by radio frequency magnetron reactive sputtering method
    利用射頻磁控反應(yīng)濺射法,在藍寶石試片和半球形頭罩上制備出所設(shè)計的sio _ 2和sio _ 2 si增透膜系。
  • Through the technology of rf and dc reactive sputtering manufacture , h2s gas sensors have been developed on silicon substrate on which a heater made of pt were attached
    通過交流和直流反應(yīng)濺射,我們以硅基片(表面上有白金加熱電極)為基底制作h _ 2s氣敏元件。
  • The thesis main parts are as followings : ( 1 ) the mechanical properties of the cnx thin film on the various substrate materials by dc magnetron reactive sputtering . ( 2 ) the study of the cnx film structure by x - ray diffraction
    文章主要部分介紹、論述、總結(jié)了我在做畢業(yè)論文期間進行的五方面工作: ( 1 )用直流磁控反應(yīng)濺射方法在各種材料襯底上沉積cnx超硬薄膜,研究在不同襯底對薄膜的力學(xué)性質(zhì)的影響。
  • It was found that the decompose efficiency to solution associated with the number of films layer ; calcine temperature and ph value . some analyses have been performed . tio _ 2 films were also synthesized by reactive sputtering and chemical vapor deposition
    通過溶膠凝膠法制備了tio _ 2薄膜對其進行光催化反應(yīng)實驗,發(fā)現(xiàn)膜層厚度、薄膜煅燒溫度和溶液ph值對降解效率都有直接的影響,并對結(jié)果進行分析。
  • We researched fabrication at different asputtering and annealing atmosphere , the different process conduced different electrical properties . we can conclude a higher annealing temperature and higher proportion of o2 during reactive sputtering favors the improvement of electrical performances of hfo2 dielectrics ; 4 . the analysis of i - v curves of these devices displays different leakage current mechanism under different area of applied bias - voltage ; as to silc . there are different leakage current mechanism at influence of sil . c ; 5
    研究表明,在優(yōu)化工藝條件下制備的hfo _ 2介質(zhì)層中,襯底注入條件下由于其較低的體和界面缺陷密度,漏電流的輸運機制主要以schottky發(fā)射為主; silc效應(yīng)導(dǎo)致hfoz / si界面缺陷態(tài)的增加,從而使得襯底注入條件下,柵泄漏電流機制不僅有schottky發(fā)射還有f一p發(fā)射機制起主要作用; 5 )初步研究了氮化的hfo : ( hroxny )柵介質(zhì)的電學(xué)特征。
  • The experiments show an room temperature in the course of reactive sputtering conduces to restraining the surface reaction between hf02 and si layer ; 2 . we studied different surface progress . comparable with conventional method , the surface with nh4f cleaning step have superior thermal stability with hfo2 , nh4f cleaning step is introduced can reduces leakage current and eot ; 3
    柵泄漏電流的減小可歸于氧空位缺陷的減小,即高的濺射氧氣氛和氧氣氛退火有助于減小hfo _ 2柵介質(zhì)中的氧空位缺陷; 4 )研究了反應(yīng)濺射制備的hfo _ 2柵介質(zhì)漏電流機制及其silc效應(yīng)。
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